发明授权
- 专利标题: Process for preparation of stabilized oxide thin layers
- 专利标题(中): 制备稳定化氧化物薄层的方法
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申请号: US275520申请日: 1994-07-15
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公开(公告)号: US5512152A公开(公告)日: 1996-04-30
- 发明人: Heinz Schicht , Herbert Schindler , Klaus Januschkewitz , Werner Gregorowius , Wilfried Kaiser
- 申请人: Heinz Schicht , Herbert Schindler , Klaus Januschkewitz , Werner Gregorowius , Wilfried Kaiser
- 申请人地址: FRX Courbevoie
- 专利权人: Saint Gobain Vitrage
- 当前专利权人: Saint Gobain Vitrage
- 当前专利权人地址: FRX Courbevoie
- 优先权: DEX4323654.5 19930715
- 主分类号: B01J19/12
- IPC分类号: B01J19/12 ; C03C17/245 ; C03C17/36 ; C23C14/08 ; C23C14/58 ; C23C14/34 ; B05D3/06 ; B05D5/06
摘要:
A method for improving the quality of a system of layers deposited on a substrate such as glass is provided, in which, the system of layers have an oxide-based surface layer, in particular n-type semi-conductor oxides such as SnO.sub.x, in which the surface layer is subjected to IR irradiation to provide a stabilization of the layer equivalent to or better than with a 48-hour exposure to the air.