发明授权
US5512152A Process for preparation of stabilized oxide thin layers 失效
制备稳定化氧化物薄层的方法

Process for preparation of stabilized oxide thin layers
摘要:
A method for improving the quality of a system of layers deposited on a substrate such as glass is provided, in which, the system of layers have an oxide-based surface layer, in particular n-type semi-conductor oxides such as SnO.sub.x, in which the surface layer is subjected to IR irradiation to provide a stabilization of the layer equivalent to or better than with a 48-hour exposure to the air.
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