发明授权
- 专利标题: Pressure controlled cryopump regeneration method and system
- 专利标题(中): 压力控制低温泵再生方法及系统
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申请号: US374140申请日: 1995-01-18
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公开(公告)号: US5517823A公开(公告)日: 1996-05-21
- 发明人: Bruce R. Andeen , Gerald J. Fortier , Allen J. Bartlett , Michael J. Eacobacci , Philip C. Lessard
- 申请人: Bruce R. Andeen , Gerald J. Fortier , Allen J. Bartlett , Michael J. Eacobacci , Philip C. Lessard
- 申请人地址: MA Mansfield
- 专利权人: Helix Technology Corporation
- 当前专利权人: Helix Technology Corporation
- 当前专利权人地址: MA Mansfield
- 主分类号: F04B37/08
- IPC分类号: F04B37/08 ; F04B37/16 ; B01D8/00
摘要:
In a subatmospheric regeneration process, a relief valve and a roughing valve are coupled in parallel to a common roughing pump. During regeneration, the cryopump is warmed to release gases from cryopump stages. The relief valve opens at a first cryopump pressure level less than a predetermined maximum pressure. The maximum pressure is subatmospheric. The relief valve closes when the cryopump pressure drops below a second cryopump pressure level. Pressure in a line between the relief valve and the roughing pump is monitored to control the opening of the roughing valve to the roughing pump.