发明授权
- 专利标题： Method and apparatus for protecting uultraclean surfaces
- 专利标题（中）： 保护尿布表面的方法和装置
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申请号： US211216申请日： 1994-02-24
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公开(公告)号： US5518450A公开(公告)日： 1996-05-21
- 发明人: Anatoly A. Paveliev
- 申请人： Anatoly A. Paveliev
- 申请人地址： NLX Amsterdam
- 专利权人： Overseas Publishers Association
- 当前专利权人： Overseas Publishers Association
- 当前专利权人地址： NLX Amsterdam
- 优先权： SUX5002608 19910924
- 主分类号： F24F3/16
- IPC分类号： F24F3/16 ; B08B17/00 ; F24F13/06 ; H01L21/00 ; H01L21/02
摘要：
A method for protecting an ultraclean surface of an object includes the step of forming, from an ultraclean fluid, a laminar flow moving over the surface. In order to enhance the reliability of protection, the velocity in the layer of the laminar flow from the ultraclean is varied according to the height thereof in a cross-section perpendicular with respect to the direction of the propagation of the flow.
公开/授权文献
- US4906300A Solid state reactions with MgCO.sub.3 /MgOH 公开/授权日：1990-03-06
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