发明授权
US5519236A Semiconductor memory device having surrounding gate transistor 失效
具有周围栅极晶体管的半导体存储器件

  • 专利标题: Semiconductor memory device having surrounding gate transistor
  • 专利标题(中): 具有周围栅极晶体管的半导体存储器件
  • 申请号: US266389
    申请日: 1994-06-27
  • 公开(公告)号: US5519236A
    公开(公告)日: 1996-05-21
  • 发明人: Tohru Ozaki
  • 申请人: Tohru Ozaki
  • 申请人地址: JPX Kawasaki
  • 专利权人: Kabushiki Kaisha Toshiba
  • 当前专利权人: Kabushiki Kaisha Toshiba
  • 当前专利权人地址: JPX Kawasaki
  • 优先权: JPX5-156453 19930628
  • 主分类号: H01L27/10
  • IPC分类号: H01L27/10 H01L21/8242 H01L27/108
Semiconductor memory device having surrounding gate transistor
摘要:
A semiconductor memory device includes at least one memory cell formed on a substrate. The memory cell is constructed by a hole capacitor and a vertical transistor. The hole capacitor is formed in a hole on the substrate. The vertical transistor is formed in a semiconductor column formed in position adjacent to the hole.
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