发明授权
- 专利标题: Diffusion patterning process and screen therefor
- 专利标题(中): 扩散图案化过程及其屏幕
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申请号: US363848申请日: 1994-12-27
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公开(公告)号: US5520986A公开(公告)日: 1996-05-28
- 发明人: Carl B. Wang
- 申请人: Carl B. Wang
- 申请人地址: DE Wilmington
- 专利权人: E. I. Du Pont de Nemours and Company
- 当前专利权人: E. I. Du Pont de Nemours and Company
- 当前专利权人地址: DE Wilmington
- 主分类号: B41M1/12
- IPC分类号: B41M1/12 ; B41M3/00 ; H01L21/48 ; H05K1/09 ; H05K3/02 ; H05K3/06 ; H05K3/46 ; B32B9/00
摘要:
A non photographic method for making patterns in organic films comprising the sequential step:a) applying in predetermined pattern an imaging layer comprising an agent which is capable of changing the solubility of a solid organic polymer in at least one unpatterned layer laying in contact with solid imaging layer to form the compiled body on a substrate by screen printing with a screen having a plurality of apertures of polygon of which each side is recessed,b) drying the unpatterned layer fully or partially at a predetermined temperature to diffuse said solubility change agent from the imaging layer to the unpatterned dielectric layer(s) andc) removing the patterned imaging layer and the diffusion patterned areas of the unpatterned layer(s) which are both soluble in a predetermined eluant, by washing said compiled body with the predetermined eluant.Additionally, the following step d can be used to substitute step a above and combined with steps b and c to make fine channel type patterns in organic films:d) applying in predetermined pattern an imaging layer comprising an agent which is capable of changing the solubility of a solid organic polymer in at least one unpatterned dielectric layer laying in contact with solid imaging layer to form the compiled body on a substrate by screen printing with a screen having a plurality of grouped apertures comprising of relatively smaller size apertures with predetermined spacing.
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