发明授权
US5521113A Process for forming a butting contact through a gate electrode 失效
用于通过栅电极形成对接接触的工艺

Process for forming a butting contact through a gate electrode
摘要:
An SRAM cell includes a semiconductor substrate doped with a dopant of a first type, a highly doped region in the substrate implanted with a dopant of opposite type, a gate oxide layer on the substrate, a first conductive layer formed upon the gate oxide layer, a dielectric layer deposited over the first conductive layer, an opening in the gate oxide layer, the first conductive layer, and the dielectric layer, and a second conductive layer deposited upon the dielectric layer.
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