发明授权
US5523623A Ohmic electrode for a p-type compound semiconductor and a bipolar
transistor incorporating the ohmic electrode
失效
用于p型化合物半导体的欧姆电极和掺有欧姆电极的双极晶体管
- 专利标题: Ohmic electrode for a p-type compound semiconductor and a bipolar transistor incorporating the ohmic electrode
- 专利标题(中): 用于p型化合物半导体的欧姆电极和掺有欧姆电极的双极晶体管
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申请号: US399180申请日: 1995-03-06
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公开(公告)号: US5523623A公开(公告)日: 1996-06-04
- 发明人: Manabu Yanagihara , Akiyoshi Tamura
- 申请人: Manabu Yanagihara , Akiyoshi Tamura
- 申请人地址: JPX Osaka
- 专利权人: Matsushita Electric Industrial Co., Ltd.
- 当前专利权人: Matsushita Electric Industrial Co., Ltd.
- 当前专利权人地址: JPX Osaka
- 优先权: JPX6-038247 19940309; JPX6-163754 19940715
- 主分类号: H01L21/285
- IPC分类号: H01L21/285 ; H01L21/331 ; H01L29/45 ; H01L29/737
摘要:
An ohmic electrode for a p-type III-V compound semiconductor is disclosed. The ohmic electrode formed on a p-type III-V compound semiconductor layer includes nickel (Ni), titanium (Ti), and platinum (Pt) as main components in an interface between the ohmic electrode and the p-type III-V compound semiconductor layer.
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