发明授权
- 专利标题: Method for synthesizing compound semiconductor polycrystals and apparatus therefor
- 专利标题(中): 化合物半导体多晶体的合成方法及其设备
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申请号: US478016申请日: 1990-02-09
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公开(公告)号: US5524571A公开(公告)日: 1996-06-11
- 发明人: Akihisa Kawasaki , Toshihiro Kotani
- 申请人: Akihisa Kawasaki , Toshihiro Kotani
- 申请人地址: JPX Osaka
- 专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人地址: JPX Osaka
- 优先权: JPX59-278834 19841228; JPX59-281270 19841229
- 主分类号: B01J3/04
- IPC分类号: B01J3/04 ; C01B19/00 ; C01B25/08 ; C01G9/08 ; C22C1/00 ; C30B15/02
摘要:
Herein disclosed are apparatuses for manufacturing compound semiconductor polycrystals comprising a pressure vessel, an upper shaft, a container for a first component fixed to the upper shaft, a heater around the container, a lower shaft, a susceptor and a crucible for charging a second component, a heater for the crucible and a communicating pipe for spatially connecting the container and the crucible optionally provided with a porous member at the lower extremity and/or a cylindrical member for confining a space over a part of the melt surface contained in the crucible from the remaining inner space of the vessel, the apparatuses permitting the substantial reduction of the reaction time and an improvement of the yield of the polycrystals due to the presence of the porous member and/or the cylindrical member separating the inner space of the vessel into two portions.
公开/授权文献
- US6164351A Precision-balanced cutter head and method 公开/授权日:2000-12-26
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