Invention Grant
- Patent Title: Time multiplexed fringe counter
- Patent Title (中): 时间复用边缘计数器
-
Application No.: US277739Application Date: 1994-07-20
-
Publication No.: US5526114APublication Date: 1996-06-11
- Inventor: Steven A. Eselun
- Applicant: Steven A. Eselun
- Assignee: Eselun; Steven A.
- Current Assignee: Eselun; Steven A.
- Main IPC: G01B9/02
- IPC: G01B9/02
Abstract:
A method and apparatus for making measurements on light fringes such as are produced by interferometers or gratings wherein such measurements can include measurements of position and velocity of an object such as a step and repeat carriage or microscope stageThe fringe pattern is sensed with a linear array detector whose elements are repetitively time multiplexed. The resultant output signal is filtered, yielding an AC signal with a phase indicative of fringe position. Rapid, digital, submicron counting is made possible using a phase lock loop to control the multiplexor clock. The advantages of AC interferometry are realized without optical modulation.
Public/Granted literature
- US6134490A Power steering device assisted by variable power Public/Granted day:2000-10-17
Information query