公开(公告)号：US5165045A

公开(公告)日：1992-11-17

申请号：US774781

申请日：1991-10-10

Applicant: Steven A. Eselun

Inventor： Steven A. Eselun

IPC: G01D5/38 ,  G01L1/08

CPC classification number: G01L1/086 ,  G01D5/38

Abstract: A method and apparatus for generating and detecting changes in interference patterns such as may be used to measure small displacements. A collimated beam is diffracted to produce a standing wavefront along a surface. The surface is coincident with the surface of a device which emits a signal in response to changes in the intensity of the wave front. In one embodiment, the diffracting means is a grating and the signal emitting means includes a beam splitter that generates an interference pattern responsive to the intensity of the wave front. In another embodiment, the signal emitting means is a membrane that emits a signal in response to changes in the wavefront. The apparatus and method can be used in applications which include measurement of displacement and measurement of force in which no displacement takes place.

Abstract translation: 用于产生和检测诸如可用于测量小位移的干涉图案变化的方法和装置。 准直光束被衍射以沿着表面产生驻波。 该表面与响应于波前强度变化发出信号的装置的表面重合。 在一个实施例中，衍射装置是光栅，并且信号发射装置包括响应于波前的强度产生干涉图案的分束器。 在另一个实施例中，信号发射装置是响应于波前的变化而发出信号的膜。 该装置和方法可用于包括测量位移和不发生位移的力的测量的应用中。

公开(公告)号：US5526114A

公开(公告)日：1996-06-11

申请号：US277739

申请日：1994-07-20

Applicant: Steven A. Eselun

Inventor： Steven A. Eselun

IPC: G01B9/02

CPC classification number: G01B9/02083 ,  G01B2290/45

Abstract: A method and apparatus for making measurements on light fringes such as are produced by interferometers or gratings wherein such measurements can include measurements of position and velocity of an object such as a step and repeat carriage or microscope stageThe fringe pattern is sensed with a linear array detector whose elements are repetitively time multiplexed. The resultant output signal is filtered, yielding an AC signal with a phase indicative of fringe position. Rapid, digital, submicron counting is made possible using a phase lock loop to control the multiplexor clock. The advantages of AC interferometry are realized without optical modulation.

Abstract translation: 用于对诸如由干涉仪或光栅产生的光条纹进行测量的方法和装置，其中这样的测量可以包括物体的位置和速度的测量，例如台阶和重复支架或显微镜台。条纹图案用线性阵列 其元件被重复时间复用的检测器。 所得到的输出信号被滤波，产生具有指示边缘位置的相位的AC信号。 使用锁相环来控制多路复用器时钟，可实现快速，数字，亚微米计数。 AC干涉测量的优点在没有光学调制的情况下实现。