发明授权
- 专利标题: Positive resist composition
- 专利标题(中): 正抗蚀剂组成
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申请号: US227145申请日: 1994-04-13
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公开(公告)号: US5532107A公开(公告)日: 1996-07-02
- 发明人: Masayuki Oie , Shoji Kawata , Takamasa Yamada , Shinya Ikeda
- 申请人: Masayuki Oie , Shoji Kawata , Takamasa Yamada , Shinya Ikeda
- 申请人地址: JPX Tokyo
- 专利权人: Nippon Zeon Co., Ltd.
- 当前专利权人: Nippon Zeon Co., Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX1-298857 19891117
- 主分类号: G03F7/022
- IPC分类号: G03F7/022 ; H01L21/027 ; H01L21/30 ; G03F7/023 ; C07C245/00
摘要:
Disclosed herein is a positive resist composition comprising an alkali-soluble phenolic resin and a photosensitive agent, characterized in that the positive resist composition contains, as the photosensitive agent, the quinonediazide sulfonate of at least one of phenolic compounds represented by the following general formulae (I) and (II): ##STR1## wherein R.sub.1 through R.sub.4 mean individually a hydrogen or halogen atom, a hydroxyl group, an alkyl or alkenyl group having 1-3 carbon atoms, or a hydroxyalkyl group having 1-3 carbon atoms and may be equal to or different from one another, and R.sub.5 denotes a hydrogen atom, an alkyl or alkenyl group having 1-3 carbon atoms, or an aryl group with the proviso that the number of hydroxyl groups is 3 or 4; and ##STR2## wherein R.sub.6 through R.sub.9 mean individually a hydrogen or halogen atom, an alkyl or alkenyl group having 1-3 carbon atoms, or a hydroxyalkyl group having 1-3 carbon atoms and may be equal to or different from one another, and R.sub.10 denotes a hydrogen atom, an alkyl or alkenyl group having 1-3 carbon atoms, or an aryl group with the proviso that the number of hydroxyl groups is 5 and at least one of R.sub.6 through R.sub.9 is an atom or group other than hydrogen atom. It is suitable for use in minute processing.
公开/授权文献
- US4904891A Ventilated electric motor assembly 公开/授权日:1990-02-27
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