- 专利标题： Piezoresistive accelerometer with enhanced performance
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申请号： US303456申请日： 1994-09-09
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公开(公告)号： US5539236A公开(公告)日： 1996-07-23
- 发明人: Anthony D. Kurtz , Alexander A. Ned
- 申请人： Anthony D. Kurtz , Alexander A. Ned
- 申请人地址： NJ Leonia
- 专利权人： Kulite Semiconductor Products, Inc.
- 当前专利权人： Kulite Semiconductor Products, Inc.
- 当前专利权人地址： NJ Leonia
- 主分类号： G01P15/12
- IPC分类号： G01P15/12 ; H01L29/82
摘要：
An electromechanical transducer is provided, and the process for making it utilizes a piezoresistive element or gage which is dielectrically isolated from a gap spanning member and substrate upon which it is supported. The gage of the invention is a force gage and is derived from a sacrificial wafer by a series of etching and bonding steps which ultimately provide a gage with substantially reduced strain energy requirements.
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