发明授权
- 专利标题: Liquid crystal device and display apparatus with multilayer electrodes
- 专利标题(中): 具有多层电极的液晶装置和显示装置
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申请号: US386177申请日: 1995-02-09
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公开(公告)号: US5543946A公开(公告)日: 1996-08-06
- 发明人: Takashi Enomoto , Toshifumi Yoshioka , Naoya Nishida
- 申请人: Takashi Enomoto , Toshifumi Yoshioka , Naoya Nishida
- 申请人地址: JPX Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX2-042611 19900226
- 主分类号: G02F1/1343
- IPC分类号: G02F1/1343 ; H01L21/3205 ; H01L23/52 ; H01L29/40 ; G02F1/13
摘要:
A liquid crystal device is formed by disposing a liquid crystal between a pair of oppositely disposed electrodes, at least one of which has a laminated structure including a first layer of ITO (indium tin oxide), a second layer of Mo (molybdenum) or its alloy, and a third layer of Al (aluminum) or its alloy, disposed in the order named. Because of the Mo-based second layer, the ITO layer is protected during development of a photoresist layer formed on the Al-based third layer even if some pinholes are present in the Al-based third layer. The Mo-based second layer can be etched by an etchant for the Al-based third layer so that the entire process is not complicated because of the provision of the Mo-based second layer.
公开/授权文献
- USH917H Polymer blend 公开/授权日:1991-05-07
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