发明授权
- 专利标题： Multiple wavelength polarization-modulated ellipsometer with phase-generated carrier
- 专利标题（中）： 具有相位生成载波的多波长偏振调制椭偏仪
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申请号： US311263申请日： 1994-09-23
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公开(公告)号： US5548404A公开(公告)日： 1996-08-20
- 发明人: Vladimir Kupershmidt , Mikhail Kouchnir , Robert Petersen
- 申请人： Vladimir Kupershmidt , Mikhail Kouchnir , Robert Petersen
- 申请人地址： CA Sausalito
- 专利权人： Sunshine Medical Instruments, Inc.
- 当前专利权人： Sunshine Medical Instruments, Inc.
- 当前专利权人地址： CA Sausalito
- 主分类号： G01N21/21
- IPC分类号： G01N21/21 ; G01J4/00
摘要：
A method and apparatus for analyzing a sample wherein at least two orthogonally polarized, intensity and phase modulated laser beams with different wavelengths and frequencies of intensity and phase modulation are directed onto the sample, and the signals derived from the laser beams which interact with the sample are synchronously demodulated to determine characteristics of the sample such as index of refraction, absorption coefficient and film thickness. A reference beam can be provided to correct for noise and drift.