发明授权
- 专利标题: Non-volatile memory cell structure and process for forming same
- 专利标题(中): 非易失性存储单元结构及其形成工艺
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申请号: US483423申请日: 1995-06-07
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公开(公告)号: US5557565A公开(公告)日: 1996-09-17
- 发明人: Cetin Kaya , Howard Tigelaar
- 申请人: Cetin Kaya , Howard Tigelaar
- 申请人地址: TX Dallas
- 专利权人: Texas Instruments Incorporated
- 当前专利权人: Texas Instruments Incorporated
- 当前专利权人地址: TX Dallas
- 主分类号: G11C11/412
- IPC分类号: G11C11/412 ; G11C16/04 ; H01L21/8247 ; H01L27/115 ; H01L29/423 ; H01L29/788 ; H01L29/792 ; G11C17/00 ; G11C7/00
摘要:
A non-volatile split-gate memory cell 8 which can be programmed with only a five volt power supply and is fabricated using standard transistor processing methods, comprises a semiconductor substrate 10 with a source 12 and a drain 14 region separated by a channel region 16. A conductive floating gate 18 is formed over a portion 16a of the channel region 16 and separated by a FAMOS oxide 20. A conductive control gate 22 is formed over but electrically insulated from the floating gate 18 and over a second portion 16b of the channel region 16. The control gate 22 is separated from the second portion of the channel 16b by a pass oxide 26 which is thicker than the FAMOS oxide 20. Other embodiments and processes are also disclosed.
公开/授权文献
- USD346037S Arched paving 公开/授权日:1994-04-12
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