- 专利标题: Non-contact type moving table
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申请号: US466409申请日: 1995-06-06
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公开(公告)号: US5562395A公开(公告)日: 1996-10-08
- 发明人: Nobuto Yamazaki , Minoru Torihata , Shinji Maki
- 申请人: Nobuto Yamazaki , Minoru Torihata , Shinji Maki
- 申请人地址: JPX Tokyo
- 专利权人: Kabushiki Kaisha Shinkawa
- 当前专利权人: Kabushiki Kaisha Shinkawa
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX4-227975 19920804
- 主分类号: B23Q1/00
- IPC分类号: B23Q1/00 ; B23Q1/38 ; B23Q1/62 ; B65G7/06 ; F16C29/02 ; F16C32/06 ; H01L21/683 ; H05K13/00 ; F16C37/06
摘要:
A non-contact type moving table including a guide table having a flat guide surface at the top and a moving table which is placed on the guide table and has a moving surface which faces the guide surface of the guide table. The moving table has air blowing openings that blow out compressed air towards the guide surface of the guide table and air suction openings sucking air from the guide surface of the guide table, thus obtaining a single plane, non-contact type bearing or supporting system via the guide surface and the moving surface. As a result, the structure is simple and overall size can be small with low manufacturing costs. In addition, a wide range of materials can be used to build the moving table system.
公开/授权文献
- US5061297A Apparatus for and method of providing improved gas separation 公开/授权日:1991-10-29
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