发明授权
- 专利标题: Photoreceiver having multiple functions
- 专利标题(中): 光接收机具有多种功能
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申请号: US517416申请日: 1995-08-21
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公开(公告)号: US5565989A公开(公告)日: 1996-10-15
- 发明人: Sang-Cheol Kim
- 申请人: Sang-Cheol Kim
- 申请人地址: KRX Kyeongsangnam-do
- 专利权人: Samsung Aerospace Industries, Ltd.
- 当前专利权人: Samsung Aerospace Industries, Ltd.
- 当前专利权人地址: KRX Kyeongsangnam-do
- 优先权: KRX94-20932 19940824
- 主分类号: G01J1/02
- IPC分类号: G01J1/02 ; G03F7/20 ; G03F9/00 ; H01L21/027 ; G01B11/00
摘要:
The present invention relates to a light-exposure assembly. It includes a mask which is placed on a mask stage to accept exposed light. A work-piece stage is placed under the mask stage. A projection lens is placed in between the mask stage and the work-piece stage to form an image on the work-piece stage by accepting the exposed light. A first mark is carved on the mask to detect the parallel-degree of movement of the mask stage and the work-piece stage. A second mark is carved on the mask to measure changes in magnification of a projection lens by moving together the above first mark. A third mark is carved on the mask to determine focus point of the projection lens. A fourth mark is carved on the work-piece stage to assist the first and second marks. A first optical detecting part is placed on the work-piece stage, on which a fourth mark is carved to assist the movement of the first and second marks, and to detect the exposed light. A second optical detecting part is placed on the above work-piece stage to detect the exposed light. The photoreceiver has multiple functions to detect automatically, by a kind of photoreceiver, light-uniform-rate of exposure of the light source, to perceive changes in the magnification of a projection lens, to calculate the parallel-degree of movement in the mask stage and the work-piece stage, and to calculate the focus-position of the projection lens.
公开/授权文献
- US4987564A Acoustic apparatus 公开/授权日:1991-01-22
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