发明授权
- 专利标题: Optical displacement sensor
- 专利标题(中): 光学位移传感器
-
申请号: US429236申请日: 1995-04-25
-
公开(公告)号: US5569913A公开(公告)日: 1996-10-29
- 发明人: Koh Ishizuka , Yasushi Kaneda
- 申请人: Koh Ishizuka , Yasushi Kaneda
- 申请人地址: JPX Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX6-089990 19940427
- 主分类号: G01B11/00
- IPC分类号: G01B11/00 ; G01D5/38 ; H01J3/14
摘要:
An apparatus for detecting a displacement of a diffraction grating set on a measured object, comprises a light-emitting device, a separation optical element for separating a beam from the light-emitting device into a plurality of beams, a multiplexing optical element for multiplexing light beams diffracted by the diffraction grating from two beams out of the plurality of beams, a first detecting unit for detecting interference light generated when the beams of diffracted light are multiplexed by the multiplexing optical element and outputting a signal related to relative displacement information to the diffraction grating, and a second detecting unit for outputting a signal related to different information from the relative displacement information to the diffraction grating, based on a change in a diffracted light quantity of diffracted light by the diffraction grating from another beam out of the plurality of beams and/or another diffracted light by the diffraction grating from the two beams.
公开/授权文献
- US4489536A Packaging method 公开/授权日:1984-12-25
信息查询