发明授权
- 专利标题： Heat treatment furnace with an exhaust baffle
- 专利标题（中）： 热处理炉带排气挡板
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申请号： US451224申请日： 1995-05-26
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公开(公告)号： US5571333A公开(公告)日： 1996-11-05
- 发明人: Koichi Kanaya
- 申请人： Koichi Kanaya
- 申请人地址： JPX Tokyo
- 专利权人： Shin-Etsu Handotai Co. Ltd.
- 当前专利权人： Shin-Etsu Handotai Co. Ltd.
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX6-143809 19940602
- 主分类号： H01L21/22
- IPC分类号： H01L21/22 ; H01L21/00 ; H01L21/324 ; C23C16/00
摘要：
A heat treatment furnace has a reaction tube with one open end and a detachable front cap with an exhaust port provided such that it closes the opening of the reaction tube. A detachable inner tube is provided in an opening of the reaction tube wherein the inner tube has a cylindrical side whose diameter is smaller than the inner diameter of the reaction tube. A disk-shaped end is located such that there is a space between the disk-shaped end and the front cap and it has a through hole(s).
公开/授权文献
- US5055226A Manufacturing method for red phosphor 公开/授权日：1991-10-08
信息查询
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