发明授权
- 专利标题： Light valve device using semiconductive composite substrate
- 专利标题（中）： 光阀装置采用半导体复合基板
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申请号： US460538申请日： 1995-06-02
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公开(公告)号： US5572045A公开(公告)日： 1996-11-05
- 发明人: Kunihiro Takahashi , Yoshikazu Kojima , Hiroaki Takasu , Nobuyoshi Matsuyama , Hitoshi Niwa , Tomoyuki Yoshino , Tsuneo Yamazaki
- 申请人： Kunihiro Takahashi , Yoshikazu Kojima , Hiroaki Takasu , Nobuyoshi Matsuyama , Hitoshi Niwa , Tomoyuki Yoshino , Tsuneo Yamazaki
- 申请人地址： JPX
- 专利权人： Seiko Instruments Inc.
- 当前专利权人： Seiko Instruments Inc.
- 当前专利权人地址： JPX
- 优先权： JPX2-309437 19901115; JPX3-6501 19910123; JPX3-22420 19910216; JPX3-79330 19910411; JPX3-79337 19910411
- 主分类号： H01L29/78
- IPC分类号： H01L29/78 ; G02F1/1335 ; G02F1/1362 ; H01L21/336 ; H01L21/762 ; H01L21/77 ; H01L21/84 ; H01L29/786 ; H01L33/00
摘要：
Herein disclosed are a semiconductor device having a double-side wiring structure, in which a single crystal semiconductor thin film formed integrally with transistor elements is laminated on an insulating thin film and is formed with through holes and in which the insulating thin film is formed on its back with electrodes and a shielding film, and a light valve device using the semiconductor device. Over the single crystal semiconductor thin film, there are formed switching elements of transistors, pixel electrodes connected electrically with the switching elements, and drive circuits for scanning and driving the switching elements. Also disclosed is a miniature highly dense light valve device. In this light valve device, an electrooptical substance is arranged between a multi-layer substrate, which is formed with electrodes and a shielding film at the opposed side of the insulating film to the side formed with the grouped elements through the insulating film, and a transparent opposite substrate, so that the optical transparency of the electrooptical substance is controlled by the switching elements.
公开/授权文献
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