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US5572543A Laser system with a micro-mechanically moved mirror 失效
具有微机械移动镜的激光系统

Laser system with a micro-mechanically moved mirror
摘要:
The invention provides a laser system with one or several micro-mechnically produced, actively controlled laser mirrors which are provided with an actuation device, so that the rapid manipulation of small laser mirrors is assured. The mirrors are designed so that they permit an economical production in large numbers.
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