发明授权
US5576488A Micro-sensor thin-film anemometer 失效
微传感器薄膜风速计

Micro-sensor thin-film anemometer
摘要:
A device for measuring turbulence in high-speed flows is provided which includes a micro-sensor thin-film probe. The probe is formed from a single crystal of aluminum oxide having a 14.degree. half-wedge shaped portion. The tip of the half-wedge is rounded and has a thin-film sensor attached along the stagnation line. The bottom surface of the half-wedge is tilted upward to relieve shock induced disturbances created by the curved tip of the half-wedge. The sensor is applied using a microphotolithography technique.
公开/授权文献
信息查询
0/0