High temperature fiber optic microphone having a pressure-sensing
reflective membrane under tensile stress
    1.
    发明授权
    High temperature fiber optic microphone having a pressure-sensing reflective membrane under tensile stress 失效
    高温光纤麦克风在拉伸应力下具有压敏感应反射膜

    公开(公告)号:US5146083A

    公开(公告)日:1992-09-08

    申请号:US586369

    申请日:1990-09-21

    摘要: A fiber optic microphone is provided for measuring fluctuating pressures. An optical fiber probe having at least one transmitting fiber for transmitting light to a pressure-sensing membrane and at least one receiving fiber for receiving light reflected from a stretched membrane is provided. The pressure-sensing membrane may be stretched for high frequency response. Further, a reflecting surface of the pressure-sensing membrane may have dimensions which substantially correspond to dimensions of a cross section of the optical fiber probe. Further, the fiber optic microphone can be made of materials for use in high temperature environments, for example greater than 1000.degree. F. A fiber optic probe is also provided with a backplate for damping membrane motion. The backplate further provides a means for on-line calibration of the microphone.

    摘要翻译: 提供用于测量波动压力的光纤麦克风。 提供具有至少一个用于将光传输到压力感测膜的传输光纤和至少一个用于接收从拉伸膜反射的光的接收光纤的光纤探针。 压力传感膜可以被拉伸以获得高频响应。 此外,压力感测膜的反射表面可以具有与光纤探针的横截面的尺寸基本对应的尺寸。 此外,光纤麦克风可以由用于高温环境(例如大于1000°F)的材料制成。光纤探针还设置有用于阻止膜运动的背板。 背板还提供了用于在线校准麦克风的装置。

    Multi-channel electronically scanned cryogenic pressure sensor and method for making same
    2.
    发明授权
    Multi-channel electronically scanned cryogenic pressure sensor and method for making same 失效
    多通道电子扫描低温压力传感器及其制作方法

    公开(公告)号:US06247369B1

    公开(公告)日:2001-06-19

    申请号:US09229931

    申请日:1999-01-13

    IPC分类号: G01L904

    摘要: A miniature, multi-channel, electronically scanned pressure measuring device uses electrostatically bonded silicon dies in a multi-element array. These dies are bonded at specific sites on a glass, pre-patterned substrate. Thermal data is multiplexed and recorded on each individual pressure measuring diaphragm. The device functions in a cryogenic environment without the need of heaters to keep the sensor at constant temperatures.

    摘要翻译: 微型多通道电子扫描压力测量装置在多元件阵列中使用静电键合的硅模具。 这些模具在玻璃上预定图案化的基底上的特定部位结合。 热量数据被复用并记录在每个单独的压力测量膜片上。 该器件在低温环境中起作用,无需加热器将传感器保持在恒定温度。

    Method of forming multi-element thin hot film sensors on polyimide film
    5.
    发明授权
    Method of forming multi-element thin hot film sensors on polyimide film 失效
    在聚酰亚胺薄膜上形成多元薄膜热传感器的方法

    公开(公告)号:US5484517A

    公开(公告)日:1996-01-16

    申请号:US209509

    申请日:1994-03-08

    IPC分类号: C25D5/00 C25D5/56 H05K3/38

    摘要: The invention comprises a method of forming a multi-element, thin hot film sensor on a polyimide film. The sensor is formed by first cleaning one surface of the polyimide. Then, under a continuous vacuum, the surface is simultaneously cleaned by ion bombardment while nickel is deposited by evaporation. The ion beam cleaning is discontinued and copper is then deposited to an initial thickness by evaporation without a break in the vacuum. The vacuum is then removed and a final thickness of copper is deposited by plating. Sensor patterns are then defined in the nickel and copper layers using conventional photolithography and etching techniques.

    摘要翻译: 本发明包括在聚酰亚胺膜上形成多元素薄热敏感器的方法。 传感器通过首先清洁聚酰亚胺的一个表面而形成。 然后,在连续真空下,通过离子轰击同时清洗表面,同时通过蒸发沉积镍。 中断离子束清洗,然后通过蒸发将铜沉积到初始厚度,而不会在真空中破裂。 然后除去真空,通过电镀沉积铜的最终厚度。 然后使用常规光刻和蚀刻技术在镍和铜层中限定传感器图案。

    Method of forming a multiple layer dielectric and a hot film sensor
therewith
    6.
    发明授权
    Method of forming a multiple layer dielectric and a hot film sensor therewith 失效
    形成多层电介质和热膜传感器的方法

    公开(公告)号:US5158801A

    公开(公告)日:1992-10-27

    申请号:US688361

    申请日:1991-04-15

    IPC分类号: G01F1/684 G01P5/12

    CPC分类号: G01P5/12 G01F1/6845

    摘要: The invention is a method of forming a multiple layer dielectric for use in a hot-film laminar separation sensor 21. The multiple layer dielectric substrate is formed by depositing a first layer 22 of a thermoplastic polymer such as on an electrically conductive substrate such as the metal surface 23 of a model 24 to be tested under cryogenic conditions and high Reynolds numbers. Next, a second dielectric layer 26 of fused silica is formed on the first dielectric layer 22 of thermoplastic polymer. A resistive metal film is deposited on selected areas of the multiple layer dielectric substrate to form one or more hot-film sensor elements 27 to which aluminum electrical circuits 28 deposited upon the multiple layered dielectric substrate are connected.

    摘要翻译: 本发明是一种形成用于热膜层状分离传感器21的多层电介质的方法。多层电介质基片是通过将热塑性聚合物的第一层22沉积在诸如 在低温条件下测试的型号24的金属表面23和高雷诺数。 接下来,在热塑性聚合物的第一介电层22上形成熔融二氧化硅的第二电介质层26。 电阻金属膜沉积在多层电介质基板的选定区域上,以形成一个或多个热电偶传感器元件27,铝电路28沉积在多层电介质基片上。