发明授权
US5589223A Process for producing cermet cutting tools having both longitudinal and granular crystal structures 失效
具有纵向和粒状晶体结构的金属陶瓷切割工具的制造方法

Process for producing cermet cutting tools having both longitudinal and
granular crystal structures
摘要:
A cermet cutting tool, and process for producing the same, comprising a substrate formed from titanium carbo-nitride based cermet, and a hard coating layer of average thickness 0.5.about.20 .mu.m, formed onto the surface of the cermet substrate comprising a lower layer formed from at least one layer of a compound selected from the group consisting of titanium carbide (TiC), titanium nitride (TiN), titanium carbo-nitride (TiCN), titanium carbo-oxide (TiCO) and titanium carbo-oxi-nitride (TiCNO), and aluminum oxide (Al.sub.2 O.sub.3). Additionally, at least one of the layers comprising the hard coating layer is a titanium carbo-nitride layer, and at least one layer of this titanium carbo-nitride layer comprises a longitudinal growth crystal structure, and a further layer comprises a granular crystal structure. In the method of fabrication, chemical vapor deposition is performed using a reaction gas composed of 1.about.5% of TiCl.sub.4, 0.1.about.1% of CH.sub.3 CN, 0.about.25% of N.sub.2 with the remaining portion being composed of H.sub.2, under a reaction temperature of 800.degree..about.900.degree. C. and a reaction pressure of 30.about.200 Torr.
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