发明授权
US5589304A Photomask comprising a holding frame and reinforcing member with a
ceramic oxide bond
失效
光掩模包括具有陶瓷氧化物键的保持框架和加强构件
- 专利标题： Photomask comprising a holding frame and reinforcing member with a ceramic oxide bond
- 专利标题（中）： 光掩模包括具有陶瓷氧化物键的保持框架和加强构件
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申请号： US404959申请日： 1995-03-16
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公开(公告)号： US5589304A公开(公告)日： 1996-12-31
- 发明人: Keiko Chiba , Takeshi Miyachi
- 申请人： Keiko Chiba , Takeshi Miyachi
- 申请人地址： JPX Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX6-046219 19940316
- 主分类号： G03F1/22
- IPC分类号： G03F1/22 ; H01L21/027 ; G03F9/00
摘要：
Disclosed is a mask structure which includes a membrane on which a pattern is formed or to be formed, a holding frame for holding the membrane, and a reinforcing member for reinforcing the holding frame, wherein the reinforcing member comprises ceramics and wherein the reinforcing member and the holding frame are bonded to each other through a film oxide of the ceramics. Also disclosed is a mask structure which includes a membrane on which a pattern is formed or to be formed, a holding frame for holding the membrane, and a reinforcing member for reinforcing the holding frame, wherein the reinforcing member has a major constituent the same as that of the membrane.
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