发明授权
US5589405A Method for fabricating VDMOS transistor with improved breakdown characteristics 失效
用于制造具有改进的击穿特性的VDMOS晶体管的方法

Method for fabricating VDMOS transistor with improved breakdown
characteristics
摘要:
The breakdown voltage of a VDMOS transistor is markedly increased without depressing other electrical characteristics of the device by tying the potential of a field-isolation diffusion, formed under the edge portion of a strip of field oxide separating a matrix of source cells from a drain diffusion, to the source potential of the transistor. This may be achieved by extending a body region of a peripheral source cell every given number of peripheral cells facing the strip of field-isolation structure until it intersects said field-isolation diffusion. By so connecting one peripheral source cell every given number of cells, the actual decrement of the overall channel width of the integrated transistor is negligible, thus leaving unaltered the electrical characteristics of the power transistor.
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