Invention Grant
- Patent Title: Wafer of transducer chips
- Patent Title (中): 传感器芯片的晶片
-
Application No.: US289688Application Date: 1994-08-12
-
Publication No.: US5596222APublication Date: 1997-01-21
- Inventor: Jonathan J. Bernstein
- Applicant: Jonathan J. Bernstein
- Applicant Address: MA Cambridge
- Assignee: The Charles Stark Draper Laboratory, Inc.
- Current Assignee: The Charles Stark Draper Laboratory, Inc.
- Current Assignee Address: MA Cambridge
- Main IPC: G01H11/06
- IPC: G01H11/06 ; H01L27/20 ; H01L23/544
Abstract:
A wafer and a method of making a wafer containing a plurality of severable transducer chips includes a wafer; a plurality of transducer chips formed on the wafer; and a grid of longitudinal and latitudinal grooves in the wafer for separating the chips from each other and enabling them to be easily, individually severed from the wafer, as well as a transducer chip and a method of making it, having integral raised contacts adapted for a flip chip or beam lead interconnection, with a transducer formed on the chip; and a plurality of raised contacts integrally formed with the chip and electrically interconnected with the transducer.
Public/Granted literature
- US4513285A Quasi coherent two-way ranging apparatus Public/Granted day:1985-04-23
Information query