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    MEMS ELECTROSTATIC FLUIDIC PUMPS AND VALVES
    2.
    发明申请
    MEMS ELECTROSTATIC FLUIDIC PUMPS AND VALVES 有权
    MEMS静电流体泵和阀

    公开(公告)号：US20110150667A1

    公开(公告)日：2011-06-23

    申请号：US12971654

    申请日：2010-12-17

    Applicant: Jonathan J. Bernstein

    Inventor： Jonathan J. Bernstein

    IPC: H02K44/00 ,  F04B49/06

    CPC classification number: F04B19/006 ,  B01L3/5027 ,  F04B9/10 ,  F16K99/0001 ,  F16K99/0017 ,  F16K99/0051 ,  F16K2099/0094

    Abstract: In various embodiments, a pump is provided that includes a microfluidic channel and a plurality of electrodes for electrostatically translating a target fluid along the channel from an inlet to an outlet. In other embodiments, a valve includes a microfluidic channel, a reservoir in fluidic communication with the channel, and an electrode for electrostatically drawing a fluid from the reservoir into the channel so as to block the flow of other fluids through the channel.

    Abstract translation: 在各种实施例中，提供了一种泵，其包括微流体通道和多个电极，用于将目标流体沿着通道从入口静电地平移到出口。 在其他实施例中，阀包括微流体通道，与通道流体连通的储存器，以及用于将流体从储存器静电拉入通道的电极，以阻止其它流体通过通道的流动。

    Capacitive ultrasound transducer
    3.
    发明授权
    Capacitive ultrasound transducer 有权
    电容式超声换能器

    公开(公告)号：US06639339B1

    公开(公告)日：2003-10-28

    申请号：US09569080

    申请日：2000-05-11

    Applicant: Jonathan J. Bernstein

    Inventor： Jonathan J. Bernstein

    IPC: H04R1700

    CPC classification number: B06B1/0292

    Abstract: A capacitive ultrasound transducer including a dielectric diaphragm with an electrode; a porous layer; and a spacer structure between the diaphragm and porous layer for defining a capacitive gap between them; the pores of the porous layer providing a compliant reservoir for the fluid in the gap.

    Abstract translation: 一种电容式超声换能器，包括具有电极的电介质膜片; 多孔层; 以及隔膜和多孔层之间的间隔结构，用于限定它们之间的电容间隙; 多孔层的孔为间隙中的流体提供顺应的储存器。

    Reentrant microwave resonant cavity accelerometer
    4.
    发明授权
    Reentrant microwave resonant cavity accelerometer 有权
    可重入微波谐振腔加速度计

    公开(公告)号：US06481286B1

    公开(公告)日：2002-11-19

    申请号：US09650783

    申请日：2000-08-30

    Applicant: Jonathan J. Bernstein ,  Anthony Petrovich

    Inventor： Jonathan J. Bernstein ,  Anthony Petrovich

    IPC: G01P1508

    CPC classification number: G01P15/097

    Abstract: An improved microwave resonant cavity accelerometer includes a reentrant microwave resonant cavity. Preferably, the accelerometer includes first and second complementary reentrant microwave resonant cavities, each being characterized by a nominal resonant frequency. Each cavity includes a capacitive gap, and an inductive gap surrounding each capacitive gap. A coupler couples to each cavity a microwave signal substantially at the nominal resonant frequency of each cavity. In response to an acceleration force along a sensing axis, a proof mass positioned along the sensing axis differentially changes the dimensions of each cavity and establishes a resonant frequency for each cavity which varies as a function of the acceleration force. The accelerometer includes means for detecting electromagnetic energy in each cavity and determining the frequency of the detected energy. The shift in resonant frequency is used to determine the acceleration of the proof mass. By using-reentrant cavities, the sensitivity of the accelerometer to an acceleration of the proof mass is improved by a factor of about 100 for miniaturized proof masses. The accelerometer may be fabricated using micromachining techniques.

    Abstract translation: 改进的微波谐振腔加速度计包括可重入微波谐振腔。 优选地，加速度计包括第一和第二互补可折入的微波谐振腔，每个都具有标称谐振频率。 每个腔包括电容性间隙和围绕每个电容间隙的电感间隙。 耦合器耦合到每个空腔，基本上以每个空腔的标称谐振频率的微波信号耦合。 响应于沿着感测轴的加速力，沿着感测轴定位的检测质量块差异地改变每个空腔的尺寸，并且为根据加速力变化的每个空腔建立谐振频率。 加速度计包括用于检测每个空腔中的电磁能并确定检测能量的频率的装置。 谐振频率的移动用于确定校验质量的加速度。 通过使用凹陷腔，加速度计对检测质量的加速度的灵敏度对于小型化的检验质量提高约100倍。 加速度计可以使用微加工技术制造。

    Ferroic transducer
    5.
    发明授权
    Ferroic transducer 失效
    铁磁传感器

    公开(公告)号：US06323580B1

    公开(公告)日：2001-11-27

    申请号：US09301188

    申请日：1999-04-28

    Applicant: Jonathan J. Bernstein

    Inventor： Jonathan J. Bernstein

    IPC: H01L4108

    CPC classification number: H01L41/0973 ,  H01L27/20 ,  H01L37/02 ,  H01L41/047

    Abstract: An interdigitated electrode ferroic transducer includes a film of ferroic material electrically polarized substantially in the plane of the film; and a set of interdigitated electrodes including at least two electrodes spaced from one another on the same side of the film and disposed at the termini of the polarization field.

    Abstract translation: 交叉电极铁电转换器包括基本上在膜的平面中电极化的铁材料膜; 以及一组交错电极，其包括在膜的同一侧上彼此间隔开的至少两个电极，并设置在极化场的末端。

    Comb-drive micromechanical tuning fork gyroscope with piezoelectric readout
    6.
    发明授权
    Comb-drive micromechanical tuning fork gyroscope with piezoelectric readout 失效
    具有压电读数的梳齿驱动微机械音叉陀螺仪

    公开(公告)号：US5767405A

    公开(公告)日：1998-06-16

    申请号：US584377

    申请日：1996-01-11

    Applicant: Jonathan J. Bernstein ,  Marc S. Weinberg

    Inventor： Jonathan J. Bernstein ,  Marc S. Weinberg

    IPC: G01C19/5719 ,  H03H9/02 ,  G01P9/04

    CPC classification number: G01C19/5719 ,  H03H9/02259 ,  H03H2009/02496 ,  H03H2009/02511

    Abstract: A microfabricated, tuning fork rate sensitive structure and drive electronics in which vibrational forces are communicated through a set of meshing drive and driven finger electrodes associated with each of two vibrating elements. The vibrating elements are supported in a rotatable assembly between first and second support electrodes which are in turn suspended by flexures for rotation about an axis passing through the flexures and through a point midway between the vibrating elements. Additional masses are formed onto the vibrating elements to improve overall sensor sensitivity. Sense electrodes for detecting capacitive changes between the support beams and the substrate are positioned on the substrate beneath each end of the support beams. In an alternative embodiment, piezoelectric sense capacitors are disposed on the flexures for detecting rotation of the support electrodes. Drive electronics are connected between the driven fingers of the vibrating elements and the drive electrode fingers which mesh with them to cause vibration. Excitation is provided between the support electrodes and the sense electrodes. Any change in signal resulting from rotation of the assembly and the resulting variation in capacitance between the support electrodes and the sense electrodes or within the piezoelectric capacitors is sensed as a measure of inertial rate. A torque loop may be additionally formed using the sense electrodes in order to re-torque the assembly to a neutral position in a torque-to-balance loop.

    Abstract translation: 一种微型的音叉速率敏感结构和驱动电子设备，其中振动力通过与两个振动元件中的每一个相关联的一组啮合驱动和被驱动的手指电极而传递。 振动元件被支撑在第一和第二支撑电极之间的可旋转组件中，第一和第二支撑电极又通过弯曲部悬挂，以便绕穿过弯曲部的轴线并通过振动元件之间的中心点旋转。 附加的质量形成在振动元件上以提高传感器的灵敏度。 用于检测支撑梁和基板之间的电容变化的感测电极定位在支撑梁的每个端部下方的基板上。 在替代实施例中，压电感测电容器设置在挠曲件上以检测支撑电极的旋转。 驱动电子设备连接在振动元件的被驱动的指状物和与其啮合的驱动电极指状物以引起振动。 在支撑电极和感测电极之间提供激励。 由组件的旋转引起的信号的任何变化以及所产生的支撑电极和感测电极之间或压电电容器内的电容变化被感测为惯性速率的量度。 可以使用感测电极另外形成扭矩环，以便在扭矩平衡回路中将组件重新扭转到中立位置。

    Tunneling sensor with linear force rebalance and method for fabricating the same
    7.
    发明授权
    Tunneling sensor with linear force rebalance and method for fabricating the same 失效
    具有线性力重新平衡的隧道传感器及其制造方法

    公开(公告)号：US5752410A

    公开(公告)日：1998-05-19

    申请号：US694333

    申请日：1996-08-08

    Applicant: Jonathan J. Bernstein

    Inventor： Jonathan J. Bernstein

    IPC: G01L1/08 ,  B81B3/00 ,  G01P15/00 ,  G01P15/08 ,  G01P15/13

    CPC classification number: G01P15/131 ,  B81B3/0021 ,  G01P15/0802 ,  G01P15/0894 ,  B81B2201/0235 ,  B81B2203/0181 ,  B81B2203/058 ,  G01P2015/0831 ,  Y10T29/43

    Abstract: A tunneling sensor is disclosed having a pair of force rebalance capacitors that are used in a push-pull relationship so as to provide a rebalance force that is a linear function of applied rebalance voltages, which leads to an output voltage that is linearly related to input acceleration. The tunneling sensor comprises a plate electrode that is formed from and attached to a silicon substrate by a pair of torsional flexures, which provide an axis of rotation for the plate electrode. A pendulous mass is formed on a first end of the plate electrode, and a tunnel-effect contact is formed on a second end of the plate electrode. A pair of torque rebalance bridge electrodes are formed on the substrate so as to span the plate electrode. A tunnel-effect tip is formed on the substrate so as to be proximate the tunnel-effect contact and in line with the rotational path that the tunnel-effect contact takes when the plate electrode is rotated.

    Abstract translation: 公开了一种隧道传感器，其具有以推挽关系使用的一对力平衡电容器，以提供作为施加的重新平衡电压的线性函数的重新平衡力，这导致与输入线性相关的输出电压 加速。 隧道传感器包括通过一对扭转弯曲形成并附着到硅衬底的板电极，其提供用于板电极的旋转轴线。 在平板电极的第一端上形成有下摆质量，并且在平板电极的第二端上形成隧道效应接触。 在基板上形成一对扭矩重新平衡桥电极，以跨越板电极。 隧道效应尖端形成在基板上，以便靠近隧道效应接触，并且与板电极旋转时隧道效应接触所采用的旋转路径一致。

    Wafer of transducer chips
    8.
    发明授权
    Wafer of transducer chips 失效
    传感器芯片的晶片

    公开(公告)号：US5596222A

    公开(公告)日：1997-01-21

    申请号：US289688

    申请日：1994-08-12

    Applicant: Jonathan J. Bernstein

    Inventor： Jonathan J. Bernstein

    IPC: G01H11/06 ,  H01L27/20 ,  H01L23/544

    CPC classification number: G01H11/06 ,  H01L27/20 ,  Y10S148/028 ,  Y10S438/928

    Abstract: A wafer and a method of making a wafer containing a plurality of severable transducer chips includes a wafer; a plurality of transducer chips formed on the wafer; and a grid of longitudinal and latitudinal grooves in the wafer for separating the chips from each other and enabling them to be easily, individually severed from the wafer, as well as a transducer chip and a method of making it, having integral raised contacts adapted for a flip chip or beam lead interconnection, with a transducer formed on the chip; and a plurality of raised contacts integrally formed with the chip and electrically interconnected with the transducer.

    Abstract translation: 晶片和制造包含多个可分离换能器芯片的晶片的方法包括晶片; 形成在晶片上的多个换能器芯片; 以及晶片中的纵向和纬向格栅，用于将芯片彼此分离并使其能够容易地从晶片切断，以及换能器芯片及其制造方法，具有适于 倒装芯片或光束引线互连，其上形成有在芯片上的换能器; 以及与所述芯片一体形成并与所述换能器电互连的多个凸起接触件。

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