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US5599654A Process for forming patterned layer of fluorinated resin and devices containing same 失效
用于形成氟化树脂的图案层的方法和包含其的装置

Process for forming patterned layer of fluorinated resin and devices containing same
摘要：
A resin or amorphous carbon layer is coated on a substrate and then fluorinated by exposing it in a F.sub.2 gas atmosphere. The thus fluorinated resin or amorphous carbon layer can be excellent in dielectric constant and thermal resistance. The resin may be photo-sensitive so that the resin can be patterned before the fluorination. Alternatively, the resin can be fluorinated before patterning.
摘要（中）：

将树脂或无定形碳层涂覆在基材上，然后通过在F2气体气氛中将其氟化来进行氟化。 如此氟化树脂或无定形碳层的介电常数和耐热性能优异。 树脂可以是光敏的，使得树脂可以在氟化之前被图案化。 或者，树脂可以在图案化之前被氟化。

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