发明授权
- 专利标题: Optical coat reticulation post hybridization
- 专利标题(中): 光学外壳网状杂交
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申请号: US381677申请日: 1995-01-31
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公开(公告)号: US5607600A公开(公告)日: 1997-03-04
- 发明人: James F. Belcher , Craig Osborn
- 申请人: James F. Belcher , Craig Osborn
- 申请人地址: TX Dallas
- 专利权人: Texas Instruments Incorporated
- 当前专利权人: Texas Instruments Incorporated
- 当前专利权人地址: TX Dallas
- 主分类号: H01L27/16
- IPC分类号: H01L27/16 ; H01L37/02 ; B44C1/22 ; C03C15/00
摘要:
An infrared sensing array 46 is coupled to a sensing integrated circuit structure 48, and then inter-pixel thermal isolation slots 62 are etched in the optical coating 32 of the infrared sensing array 46. An optional protective material 64 may be deposited over at least the sensing integrated circuit structure 48 for additional protection.
公开/授权文献
- US4470348A Printer-processor system 公开/授权日:1984-09-11
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