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US5607600A Optical coat reticulation post hybridization 失效
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Optical coat reticulation post hybridization
摘要:
An infrared sensing array 46 is coupled to a sensing integrated circuit structure 48, and then inter-pixel thermal isolation slots 62 are etched in the optical coating 32 of the infrared sensing array 46. An optional protective material 64 may be deposited over at least the sensing integrated circuit structure 48 for additional protection.
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