发明授权
- 专利标题: Scanning electron microscope
- 专利标题(中): 扫描电子显微镜
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申请号: US359761申请日: 1994-12-20
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公开(公告)号: US5608218A公开(公告)日: 1997-03-04
- 发明人: Mitsugu Sato , Yoichi Ose , Satoru Fukuhara , Hideo Todokoro , Makoto Ezumi
- 申请人: Mitsugu Sato , Yoichi Ose , Satoru Fukuhara , Hideo Todokoro , Makoto Ezumi
- 申请人地址: JPX Tokyo
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX5-334894 19931228
- 主分类号: H01J37/22
- IPC分类号: H01J37/22 ; H01J37/05 ; H01J37/244 ; H01J37/28
摘要:
A scanning electron microscope suitable for producing an image of high resolution by detecting secondary electrons and backscattered electrons generated from a specimen at a low accelerating voltage in a separate or synthesis fashion. In the scanning electron microscope electric and magnetic fields for separating trajectories of backscattered electrons and secondary electrons generated from a specimen are established, and a backscattered electron detector for detecting generated backscattered electrons is disposed on the trajectory of the backscattered electrons. According to the microscope, since secondary electrons and backscattered electrons can be detected efficiently in a separate fashion even at a low accelerating voltage of several kilovolts or less and besides the detector does not exert the deflection action on a primary electron beam, backscattered and secondary electron images of high resolution can be obtained.
公开/授权文献
- US6157666A Controlled current feed device for electric arc furnace 公开/授权日:2000-12-05