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US5612255A One dimensional silicon quantum wire devices and the method of manufacture thereof 失效
一维硅量子线器件及其制造方法

One dimensional silicon quantum wire devices and the method of
manufacture thereof
摘要:
A silicon quantum wire transistor. A silicon substrate is sub-etched leaving a thin ridge (.ltoreq.500 .ANG. tall by .ltoreq.500 .ANG. wide) of silicon a quantum wire, on the substrate surface. An FET may be formed from the quantum wire by depositing or growing gate oxide and depositing gate poly. After defining a gate, the source and drain are defined. Alternatively, an optically activated transistor is formed by defining an emitter and collector and providing a path for illumination to the wire.
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