发明授权
- 专利标题: One dimensional silicon quantum wire devices and the method of manufacture thereof
- 专利标题(中): 一维硅量子线器件及其制造方法
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申请号: US466315申请日: 1995-06-06
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公开(公告)号: US5612255A公开(公告)日: 1997-03-18
- 发明人: Jonathan D. Chapple-Sokol , Seshadri Subbanna , Manu J. Tejwani
- 申请人: Jonathan D. Chapple-Sokol , Seshadri Subbanna , Manu J. Tejwani
- 申请人地址: NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: NY Armonk
- 主分类号: H01L21/335
- IPC分类号: H01L21/335 ; H01L29/12 ; H01L29/423 ; H01L31/0352 ; H01L31/11 ; H01L21/265 ; H01L21/44 ; H01L21/48
摘要:
A silicon quantum wire transistor. A silicon substrate is sub-etched leaving a thin ridge (.ltoreq.500 .ANG. tall by .ltoreq.500 .ANG. wide) of silicon a quantum wire, on the substrate surface. An FET may be formed from the quantum wire by depositing or growing gate oxide and depositing gate poly. After defining a gate, the source and drain are defined. Alternatively, an optically activated transistor is formed by defining an emitter and collector and providing a path for illumination to the wire.
公开/授权文献
- US5104271A Bolt connection 公开/授权日:1992-04-14
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