发明授权
US5628933A Transparent conductors comprising zinc-indium-oxide and methods for making films 失效
包含氧化铟锌的透明导体和制造薄膜的方法

Transparent conductors comprising zinc-indium-oxide and methods for
making films
摘要:
Applicant has discovered that aliovalently doped zinc-indium-oxide where In is 40-75% of the metal elements can achieve electrical conductivity comparable to wide band-gap semiconductors presently in use while exhibiting enhanced transparency in both the visible and infrared. The material can be doped to resistivity of less than 1 milliohm-cm by small quantifies of aliovalent dopants, such as tetravalent atoms. It can be deposited on glass substrates in amorphous and polycrystalline films.
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