发明授权
US5629558A Semiconductor diode integrated with bipolar/CMOS/DMOS technology
失效
集成了双极/ CMOS / DMOS技术的半导体二极管
- 专利标题: Semiconductor diode integrated with bipolar/CMOS/DMOS technology
- 专利标题(中): 集成了双极/ CMOS / DMOS技术的半导体二极管
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申请号: US454647申请日: 1995-05-31
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公开(公告)号: US5629558A公开(公告)日: 1997-05-13
- 发明人: Paola Galbiati , Ubaldo Mastromatteo
- 申请人: Paola Galbiati , Ubaldo Mastromatteo
- 申请人地址: ITX Agrate Brianza
- 专利权人: SGS-Thomson Microelectronics, S.rl
- 当前专利权人: SGS-Thomson Microelectronics, S.rl
- 当前专利权人地址: ITX Agrate Brianza
- 优先权: EPX94830266 19940531
- 主分类号: H01L21/329
- IPC分类号: H01L21/329 ; H01L29/861 ; H01L27/06 ; H01L29/00 ; H01L31/0352
摘要:
A diode integrated on semiconductor material with BCD technology and of the type provided on a substrate having a first type of conductivity inside an isolation region having a second type of conductivity. The diode comprises also a buried anode region having a first type of conductivity and a cathode region having a second type of conductivity. The cathode region comprises an epitaxial layer located above the buried anode region and a highly doped region provided inside the epitaxial layer. The buried anode region comprises depressions opposite which is located the highly doped region with the depressions being achieved by the intersection of lateral diffusions of distinct and adjacent portions of the buried anode region.
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