发明授权
US5631736A Absolute interferometer measuring process and apparatus having a
measuring interferometer, control interferometer and tunable laser
失效
具有测量干涉仪,控制干涉仪和可调激光器的绝对干涉仪测量过程和设备
- 专利标题: Absolute interferometer measuring process and apparatus having a measuring interferometer, control interferometer and tunable laser
- 专利标题(中): 具有测量干涉仪,控制干涉仪和可调激光器的绝对干涉仪测量过程和设备
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申请号: US614334申请日: 1996-03-12
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公开(公告)号: US5631736A公开(公告)日: 1997-05-20
- 发明人: Jurgen Thiel , Dieter Michel , Andreas Franz
- 申请人: Jurgen Thiel , Dieter Michel , Andreas Franz
- 申请人地址: DEX Traunreut
- 专利权人: Dr. Johannes heidenhain GmbH
- 当前专利权人: Dr. Johannes heidenhain GmbH
- 当前专利权人地址: DEX Traunreut
- 优先权: DEX4314486.1 19930503
- 主分类号: G01B9/02
- IPC分类号: G01B9/02 ; G01B11/02
摘要:
An absolute measuring interferometer having a measuring interferometer, a tunable laser emitting a laser beam and a control interferometer for adjusting the air wavelength of the laser beam. The control interferometer adjusts the air wavelength of the laser beam to a specific wavelength value at the ends of each measuring cycle. The wavelength of the tunable laser is continually tuned within the specific wavelength interval where the phase change of the interference signal is continually detected during the wavelength modulation process. An absolute measurement is determined by a simple mathematical relationship between the measured wavelength and phase changes.
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