发明授权
- 专利标题： Thin layer composite unimorph ferroelectric driver and sensor
- 专利标题（中）： 薄层复合单模铁电驱动器和传感器
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申请号： US416598申请日： 1995-04-04
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公开(公告)号： US5632841A公开(公告)日： 1997-05-27
- 发明人: Richard F. Hellbaum , Robert G. Bryant , Robert L. Fox
- 申请人： Richard F. Hellbaum , Robert G. Bryant , Robert L. Fox
- 申请人地址： DC Washington
- 专利权人： The United States of America as represented by the Administrator of the National Aeronautics and Space Administration
- 当前专利权人： The United States of America as represented by the Administrator of the National Aeronautics and Space Administration
- 当前专利权人地址： DC Washington
- 主分类号： G01L1/16
- IPC分类号： G01L1/16 ; B32B37/14 ; H01L41/09 ; H01L41/22 ; H01L41/24
摘要：
A method for forming ferroelectric wafers is provided. A prestress layer is placed on the desired mold. A ferroelectric wafer is placed on top of the prestress layer. The layers are heated and then cooled, causing the ferroelectric wafer to become prestressed. The prestress layer may include reinforcing material and the ferroelectric wafer may include electrodes or electrode layers may be placed on either side of the ferroelectric layer. Wafers produced using this method have greatly improved output motion.
公开/授权文献
- US5054585A Elevator control apparatus 公开/授权日：1991-10-08
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