发明授权
- 专利标题： Isolated sidewall capacitor having a compound plate electrode
- 专利标题（中）： 具有复合板电极的隔离侧壁电容器
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申请号： US577168申请日： 1995-12-22
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公开(公告)号： US5633781A公开(公告)日： 1997-05-27
- 发明人: Katherine L. Saenger , David E. Kotecki
- 申请人： Katherine L. Saenger , David E. Kotecki
- 申请人地址： NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： NY Armonk
- 主分类号： H01L21/02
- IPC分类号： H01L21/02 ; H01L21/8242 ; H01K1/16
摘要：
A capacitor structure is provided, with a first conductor on top of a substrate having at least one layer of dielectric material thereon; a first non-conductor on top of and substantially in register with the first conductor, the first conductor and first non-conductor having a first opening formed therein; a second conductor, in electrical contact with the first conductor, formed on the sidewalls of the first opening; a non-conductive sidewall spacer formed in the first opening and contacting the second conductor, the non-conductive sidewall spacer having a second opening formed therein; and a third conductor formed in the second opening.
公开/授权文献
- US5194953A Segmented bar display for a programmable tuner 公开/授权日：1993-03-16
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