发明授权
US5652428A Method of using scanning probe microscope allowing cleaning of probe tip
in ambient atmosphere
失效
使用扫描探针显微镜的方法，允许在环境大气中清洁探针尖
- 专利标题： Method of using scanning probe microscope allowing cleaning of probe tip in ambient atmosphere
- 专利标题（中）： 使用扫描探针显微镜的方法，允许在环境大气中清洁探针尖
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申请号： US589515申请日： 1996-01-22
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公开(公告)号： US5652428A公开(公告)日： 1997-07-29
- 发明人: Tadashi Nishioka , Takao Yasue
- 申请人： Tadashi Nishioka , Takao Yasue
- 申请人地址： JPX Tokyo JPX Hyogo
- 专利权人： Mitsubishi Denki Kabushiki Kaisha,Ryoden Semiconductor System Engineering Corporation
- 当前专利权人： Mitsubishi Denki Kabushiki Kaisha,Ryoden Semiconductor System Engineering Corporation
- 当前专利权人地址： JPX Tokyo JPX Hyogo
- 优先权： JPX7-104855 19950404
- 主分类号： G01B7/34
- IPC分类号： G01B7/34 ; G01N1/00 ; G01N27/00 ; G01N37/00 ; G01Q10/06 ; G01Q30/08 ; G01Q30/20 ; G01Q40/00 ; G01Q40/02 ; G01Q60/10 ; G01Q60/16 ; G01Q60/24 ; G01Q80/00 ; G01Q90/00 ; G02B21/00 ; H01J37/28
摘要：
A method of use of a scanning probe microscope includes the step of mounting a probe to a scanning probe microscope in ambient atmosphere, the step of drawing on a surface of a standard sample by two-dimensionally scanning while keeping constant a tunnel current under feedback control of a distance between a standard sample and the probe, the step of applying pulse voltage between the probe and the standard sample while two-dimensionally scanning, with feedback control stopped at each scanning point, the step for obtaining drawn image of the surface of the standard sample again, comparing the obtained drawn image with the drawn image obtained in the step of drawing on the surface of the standard sample thereby determining cleanness of the probe, the step of repeating the step of pulse application and the step of determination of cleanness until the probe is cleaned, the step for replacing the standard sample by a sample for measurement after cleanness of the probe is confirmed, and the step of drawing.
公开/授权文献
- US5291445A Semiconductor integrated circuit device 公开/授权日：1994-03-01