- 专利标题: Composite thermocouple protection tubes
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申请号: US655717申请日: 1996-08-07
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公开(公告)号: US5654034A公开(公告)日: 1997-08-05
- 发明人: Kenneth F. Tulloch , Lee E. Burns , Hemant D. Desai , Raymond L. Taylor
- 申请人: Kenneth F. Tulloch , Lee E. Burns , Hemant D. Desai , Raymond L. Taylor
- 申请人地址: MA Woburn
- 专利权人: CVD, Incorporated
- 当前专利权人: CVD, Incorporated
- 当前专利权人地址: MA Woburn
- 主分类号: G01K1/08
- IPC分类号: G01K1/08 ; G01K1/10 ; G01K7/02 ; C23C16/32
摘要:
A semiconductor protection tube is a ceramic tube with a layer of silicon carbide covering at least a portion of the tube adjacent an open front end of the tube and extending forward of the open end to form a hollow, closed-end tip. The protection tube is formed by providing the ceramic tube, inserting a mandrel through the tube to extend forward of the front end, and depositing silicon carbide by chemical vapor deposition over at least a front portion of the ceramic tube and over the forward-extending portion of the mandrel. Subsequent removal of the mandrel completes the production of the protection tube.