发明授权
- 专利标题: Semiconductor electrical heater and method for making same
- 专利标题(中): 半导体电加热器及其制作方法
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申请号: US614076申请日: 1996-03-12
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公开(公告)号: US5659656A公开(公告)日: 1997-08-19
- 发明人: Amitabh Das
- 申请人: Amitabh Das
- 申请人地址: NY New York
- 专利权人: Philip Morris Incorporated
- 当前专利权人: Philip Morris Incorporated
- 当前专利权人地址: NY New York
- 主分类号: H05B3/03
- IPC分类号: H05B3/03 ; A24F47/00 ; B23K26/22 ; B23K35/00 ; B23K35/30 ; H01L21/768 ; H05B3/02 ; H05B3/06 ; H05B3/14 ; B23K26/02 ; B23K26/00
摘要:
A method is disclosed for mechanically and electrically bonding metallic materials and semiconductor materials. The method according to the invention may be used, for example, in forming a semiconductor electrical heater, particularly for use in electrical smoking articles. A metallic element, such as a copper alloy power supply tab, is laser welded to a semiconductor element, such as a doped silicon resistive heater element. A laser beam is directed through a hole in the copper alloy tab to melt some silicon material, which flows into the hole in the copper tab, reacts and intermixes with the copper and solidifies to form a slug containing copper silicide. A protective material such as nickel may be applied to protect the copper silicide from oxidation if desired. An ohmic, low resistance contact and high strength bond is provided between the parts.
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