发明授权
- 专利标题: Method and apparatus for measuring thickness of layer using acoustic waves
- 专利标题(中): 使用声波测量层厚度的方法和装置
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申请号: US544932申请日: 1995-10-18
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公开(公告)号: US5663502A公开(公告)日: 1997-09-02
- 发明人: Yoshiaki Nagashima , Kenichi Fujiwara , Masao Sato , Fuminobu Takahashi , Masahiro Koike , Hajime Umehara , Yoshihiro Michiguchi
- 申请人: Yoshiaki Nagashima , Kenichi Fujiwara , Masao Sato , Fuminobu Takahashi , Masahiro Koike , Hajime Umehara , Yoshihiro Michiguchi
- 申请人地址: JPX Tokyo JPX Hitachi
- 专利权人: Hitachi, Ltd.,Hitachi Nuclear Engineering Co., Ltd.
- 当前专利权人: Hitachi, Ltd.,Hitachi Nuclear Engineering Co., Ltd.
- 当前专利权人地址: JPX Tokyo JPX Hitachi
- 优先权: JPX6-251784 19941018
- 主分类号: G01B17/02
- IPC分类号: G01B17/02 ; G01N29/11 ; G01N29/46 ; G01N29/08 ; G01N29/10
摘要:
Ultrasonic waves from a transmit device are transmitted to an object subject to measurement. A surface reflected wave propagated in a contact medium and reflected at the surface of a tube and bottom surface reflected waves passing through an oxidation layer on the tube and reflected at the inner surface of the tube are convened into electric signals. A feature extracting part 5, in consideration of a correlation relationship of energy with respect to the frequency of a received signal, based on the received signal of ultrasonic waves converted to electric signals, extracts a signal feature data determined beforehand which has a strong correlation relationship with the thickness of a measured part. Based on the extracted signal feature data, a thickness conversion part references a relationship storage part which has stored therein beforehand a function that shows a relationship between the signal feature data and the thickness of the oxidation layer, and obtains the thickness of the oxidation layer.
公开/授权文献
- US5105179A Electronic display license plate 公开/授权日:1992-04-14
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