发明授权
- 专利标题： Coulomb-blockade element and method of manufacturing the same
- 专利标题（中）： 库仑封锁元件及其制造方法
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申请号： US746654申请日： 1996-11-13
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公开(公告)号： US5665979A公开(公告)日： 1997-09-09
- 发明人: Yasuo Takahashi , Masao Nagase , Akira Fujiwara
- 申请人： Yasuo Takahashi , Masao Nagase , Akira Fujiwara
- 申请人地址： JPX
- 专利权人： Nippon Telegraph and Telephone Corporation
- 当前专利权人： Nippon Telegraph and Telephone Corporation
- 当前专利权人地址： JPX
- 优先权： JPX6-263809 19941027; JPX7-228872 19950906
- 主分类号： H01L21/335
- IPC分类号： H01L21/335 ; H01L29/76 ; H01L29/06 ; H01L39/00
摘要：
A Coulomb-blockade element includes a silicon layer formed on a substrate through an insulating film. The silicon layer includes a narrow wire portion and first and second electrode portions. The narrow wire portion serves as a conductive island for confining a charge. The first and second electrode portions are formed to be connected to the two ends of the narrow wire portion and are wider than the narrow wire portion. Each of the first and second electrode portions has constrictions on at least one of the upper and lower surfaces thereof, which make a portion near the narrow wire portion thinner than the narrow wire portion.
公开/授权文献
- US5223241A Method for early detection of allograft rejection 公开/授权日：1993-06-29
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