发明授权
- 专利标题: Multiple order dispersive optics system and method of use
- 专利标题(中): 多阶色散光学系统及其使用方法
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申请号: US530892申请日: 1995-09-20
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公开(公告)号: US5666201A公开(公告)日: 1997-09-09
- 发明人: Blaine D. Johs , Ping He , Steven E. Green , Shakil A. Pittal , John A. Woollam
- 申请人: Blaine D. Johs , Ping He , Steven E. Green , Shakil A. Pittal , John A. Woollam
- 申请人地址: NE Lincoln
- 专利权人: J.A. Woollam Co. Inc.
- 当前专利权人: J.A. Woollam Co. Inc.
- 当前专利权人地址: NE Lincoln
- 主分类号: G01J3/28
- IPC分类号: G01J3/28 ; G01J3/36 ; G01J3/447 ; G01J4/00 ; G01N21/21 ; G01N21/47
摘要:
Disclosed is a dispersive optics system, in the context of ellipsometer or polarimeter and the like systems, which, in use, produces a plurality of "Orders" of essentially single wavelength beams of light from a polychromatic beam of light. In use the availability of more than one "Order" of essentially single wavelength beams of light allows simultaneous measurement of more essentially single wavelength beams of light than would be possible were only one "Order" of essentially single wavelength beams of light present. Filters are present to reduce the effects of stray light on detector elements and to allow separating the wavelengths in overlapping regions of adjacent Orders.
公开/授权文献
- US5042731A Grinder discharge chute 公开/授权日:1991-08-27
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