发明授权
- 专利标题： Methods for forming smooth diamond-based mesa structures
- 专利标题（中）： 形成平滑金刚石台面结构的方法
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申请号： US658467申请日： 1996-06-05
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公开(公告)号： US5672240A公开(公告)日： 1997-09-30
- 发明人: Brian R. Stoner , Joseph S. Holmes, Jr. , David L. Dreifus , Scott R. Sahaida , Roy E. Fauber , Michelle L. Hartsell , Dean Malta
- 申请人： Brian R. Stoner , Joseph S. Holmes, Jr. , David L. Dreifus , Scott R. Sahaida , Roy E. Fauber , Michelle L. Hartsell , Dean Malta
- 申请人地址： NC Research Triangle Park
- 专利权人： Kobe Steel USA Inc.
- 当前专利权人： Kobe Steel USA Inc.
- 当前专利权人地址： NC Research Triangle Park
- 主分类号： H01L21/20
- IPC分类号： H01L21/20 ; H03H3/08 ; H03H9/02 ; H01L21/00 ; B44C1/22
摘要：
A diamond-based structure includes a substrate, an adhesive material on a face of the substrate, and an array of spaced apart diamond mesas bonded to the substrate by the adhesive material. In particular, each of the diamond mesas can have a growth surface adjacent the substrate and an interfacial surface opposite the substrate, and the interfacial surface can be smooth relative to the growth surface. This structure can be fabricated by providing a sacrificial substrate, forming a plurality of diamond mesas on a face of the sacrificial substrate, bonding the diamond mesas to a transfer substrate, and removing the sacrificial substrate. Accordingly, the interfacial surfaces of the diamond, which are formed adjacent the sacrificial substrate and then exposed by removing the substrate are smooth.
公开/授权文献
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