公开(公告)号：US5672240A

公开(公告)日：1997-09-30

申请号：US658467

申请日：1996-06-05

申请人： Brian R. Stoner ,  Joseph S. Holmes, Jr. ,  David L. Dreifus ,  Scott R. Sahaida ,  Roy E. Fauber ,  Michelle L. Hartsell ,  Dean Malta

发明人： Brian R. Stoner ,  Joseph S. Holmes, Jr. ,  David L. Dreifus ,  Scott R. Sahaida ,  Roy E. Fauber ,  Michelle L. Hartsell ,  Dean Malta

IPC分类号： H01L21/20 ,  H03H3/08 ,  H03H9/02 ,  H01L21/00 ,  B44C1/22

CPC分类号： H01L21/2007 ,  H03H3/08 ,  H03H9/02582

摘要： A diamond-based structure includes a substrate, an adhesive material on a face of the substrate, and an array of spaced apart diamond mesas bonded to the substrate by the adhesive material. In particular, each of the diamond mesas can have a growth surface adjacent the substrate and an interfacial surface opposite the substrate, and the interfacial surface can be smooth relative to the growth surface. This structure can be fabricated by providing a sacrificial substrate, forming a plurality of diamond mesas on a face of the sacrificial substrate, bonding the diamond mesas to a transfer substrate, and removing the sacrificial substrate. Accordingly, the interfacial surfaces of the diamond, which are formed adjacent the sacrificial substrate and then exposed by removing the substrate are smooth.

摘要翻译： 基于金刚石的结构包括基底，在基底的表面上的粘合剂材料以及通过粘合剂材料结合到基底上的间隔开的金刚石台面阵列。 特别地，每个金刚石台面可以具有邻近基底的生长表面和与基底相对的界面，并且界面表面相对于生长表面可以是平滑的。 可以通过提供牺牲衬底，在牺牲衬底的表面上形成多个金刚石台面，将金刚石台面结合到转移衬底以及去除牺牲衬底来制造该结构。 因此，与牺牲衬底相邻形成然后通过去除衬底而暴露的金刚石的界面表面是光滑的。

公开(公告)号：US5652436A

公开(公告)日：1997-07-29

申请号：US514656

申请日：1995-08-14

申请人： Brian R. Stoner ,  Joseph S. Holmes, Jr. ,  David L. Dreifus ,  Scott R. Sahaida ,  Roy E. Fauber ,  Michelle L. Hartsell ,  Dean Malta

发明人： Brian R. Stoner ,  Joseph S. Holmes, Jr. ,  David L. Dreifus ,  Scott R. Sahaida ,  Roy E. Fauber ,  Michelle L. Hartsell ,  Dean Malta

IPC分类号： H01L21/20 ,  H03H3/08 ,  H03H9/02 ,  H01L31/0312

CPC分类号： H01L21/2007 ,  H03H3/08 ,  H03H9/02582

摘要： A diamond-based structure includes a substrate, an adhesive material on a face of the substrate, and an array of spaced apart diamond mesas bonded to the substrate by the adhesive material. In particular, each of the diamond mesas can have a growth surface adjacent the substrate and an interfacial surface opposite the substrate, and the interfacial surface can be smooth relative to the growth surface. This structure can be fabricated by providing a sacrificial substrate, forming a plurality of diamond mesas on a face of the sacrificial substrate, bonding the diamond mesas to a transfer substrate, and removing the sacrificial substrate. Accordingly, the interfacial surfaces of the diamond, which are formed adjacent the sacrificial substrate and then exposed by removing the substrate are smooth.

摘要翻译： 基于金刚石的结构包括基底，在基底的表面上的粘合剂材料以及通过粘合剂材料结合到基底上的间隔开的金刚石台面阵列。 特别地，每个金刚石台面可以具有邻近基底的生长表面和与基底相对的界面，并且界面表面相对于生长表面可以是平滑的。 可以通过提供牺牲衬底，在牺牲衬底的表面上形成多个金刚石台面，将金刚石台面结合到转移衬底以及去除牺牲衬底来制造该结构。 因此，与牺牲衬底相邻形成然后通过去除衬底而暴露的金刚石的界面表面是光滑的。

公开(公告)号：US5648701A

公开(公告)日：1997-07-15

申请号：US267562

申请日：1994-06-28

申请人： William M. Hooke ,  Brian R. Stoner ,  Steven P. Bozeman ,  Roy E. Fauber ,  Tobin L. Munsat ,  Sean Washburn

发明人： William M. Hooke ,  Brian R. Stoner ,  Steven P. Bozeman ,  Roy E. Fauber ,  Tobin L. Munsat ,  Sean Washburn

IPC分类号： H05H1/46 ,  H01J7/24

CPC分类号： H01J37/321 ,  H05H1/46

摘要： A plasma system is disclosed comprising a vessel suitable for containing a plasma at a pressure of at least about 100 mtorr, a plasma gas in the vessel at a pressure of at least 100 mtorr, an antenna with a substantially planar face positioned adjacent a portion of the vessel for applying an electromagnetic field to the plasma gas to thereby generate and maintain a plasma, and means for applying an external magnetic field to the plasma gas other than the field generated by the antenna, and having a component in a direction substantially perpendicular to the planar face of the antenna.

摘要翻译： 公开了一种等离子体系统，其包括适于在至少约100mtorr的压力下容纳等离子体的容器，在至少100mtorr的压力下容纳等离子体气体，具有基本上平面的天线 用于向等离子体气体施加电磁场从而产生和维持等离子体的容器，以及用于将外部磁场施加到由天线产生的场以外的等离子体气体的装置，并且具有基本垂直于 天线的平面。