发明授权
- 专利标题: Laser casting apparatus and method
- 专利标题(中): 激光铸造设备及方法
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申请号: US385675申请日: 1995-02-08
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公开(公告)号: US5672285A公开(公告)日: 1997-09-30
- 发明人: Masaki Kondo , Shigeki Maekawa
- 申请人: Masaki Kondo , Shigeki Maekawa
- 申请人地址: JPX Osaka
- 专利权人: Matsushita Electric Industrial Co., Ltd.
- 当前专利权人: Matsushita Electric Industrial Co., Ltd.
- 当前专利权人地址: JPX Osaka
- 优先权: JPX6-15230 19940209
- 主分类号: H01L21/268
- IPC分类号: H01L21/268 ; B23K26/06 ; H01S3/10
摘要:
A laser casting apparatus includes a laser light source, a phase disturbing device for disturbing a phase of laser light output from the laser light source, and a beam forming device for forming a beam of a predetermined shape. The formed beam is cast on a work after decomposing the laser light in to beams each having a small area and then superposing the decomposed beams. The phase disturbing device disturbs the phase of the light in a manner so that the superimposed beam formed of the decomposed beams has a uniform energy distribution without interference fringes.
公开/授权文献
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