发明授权
- 专利标题： Dynamic quantity sensor and method for producing the same, distortion resistance element and method for producing the same, and angular velocity sensor
- 专利标题（中）： 动态量传感器及其制造方法，抗变形元件及其制造方法以及角速度传感器
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申请号： US538577申请日： 1995-10-03
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公开(公告)号： US5679888A公开(公告)日： 1997-10-21
- 发明人: Takao Tohda , Hiroyuki Kado , Ichiro Tanahashi , Yoshio Manabe , Masaru Yoshida
- 申请人： Takao Tohda , Hiroyuki Kado , Ichiro Tanahashi , Yoshio Manabe , Masaru Yoshida
- 申请人地址： JPX Kadoma
- 专利权人： Matsushita Electric Industrial Co., Ltd.
- 当前专利权人： Matsushita Electric Industrial Co., Ltd.
- 当前专利权人地址： JPX Kadoma
- 优先权： JPX6-241219 19941005; JPX7-090999 19950417; JPX7-105546 19950428
- 主分类号： G01B7/16
- IPC分类号： G01B7/16 ; G01C19/56 ; G01D5/18 ; G01K7/22 ; G01L1/20 ; G01P15/00 ; G01P15/08 ; G01P15/12 ; G01Q10/00 ; G01Q20/04 ; G01Q60/24 ; G01Q60/38 ; G01Q70/16 ; G01Q90/00 ; G01D5/06 ; G01B7/34
摘要：
The dynamic quantity sensor includes an electrically insulating substance layer and at least one pair of electrodes contacting the electrically insulating substance layer, wherein a plurality of conductive particles are dispersed in the electrically insulating substance layer so that a tunnel current flows when a voltage is applied between the at least one pair of electrodes, and a dynamic quantity relating to a distance between the conductive particles is detected based on the tunnel current.
公开/授权文献
- US5034344A Method of making a surface emitting semiconductor laser 公开/授权日：1991-07-23
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