Large radius probe
    1.
    发明授权

    公开(公告)号:US11448664B2

    公开(公告)日:2022-09-20

    申请号:US17069302

    申请日:2020-10-13

    申请人: Bruker Nano, Inc.

    发明人: Jeffrey Wong

    摘要: A large radius probe for a surface analysis instrument such as an atomic force microscope (AFM). The probe is microfabricated to have a tip with a hemispherical distal end or apex. The radius of the apex is the range of about a micron making the probes particularly useful for nanoindentation analyses. The processes of the preferred embodiments allow such large radius probes to be batch fabricated to facilitate cost and robustness.

    A METHOD OF PROVIDING A MEMS DEVICE COMPRISING A PYRAMIDAL PROTRUSION, AND A MOLD

    公开(公告)号:US20220187336A1

    公开(公告)日:2022-06-16

    申请号:US17603226

    申请日:2020-04-07

    申请人: SMARTTIP BV

    发明人: Edin SARAJLIC

    IPC分类号: G01Q70/10 G01Q70/16

    摘要: A method of providing a MEMS device, such as an AFM probe, having a three-sided pyramidal protrusion is made using a multitude of MEMS method steps. To allow the reliable and speedy manufacture of such a MEMS device having a three-sided protrusion on a massive scale, wherein the protrusion has a relatively small half-cone angle and a single apex, a mold is used. The mold includes a sacrificial layer on top of a base substrate. The method of providing the MEMS device includes: providing an area at the first side of the mold which area comprises a pit with a layer of protrusion material, patterning the layer of protrusion material to the desired shape, and isotropically etching the sacrificial layer of the mold with an isotropic etchant capable of etching the sacrificial layer so as to separate the MEMS device from at least the base substrate of the mold.

    Miniaturized cantilever probe for scanning probe microscopy and fabrication thereof

    公开(公告)号:US09709597B2

    公开(公告)日:2017-07-18

    申请号:US14305588

    申请日:2014-06-16

    申请人: Bruker Nano, Inc.

    摘要: Cantilever probes are formed from a multilayer structure comprising an upper substrate, a lower substrate, an interior layer, a first separation layer, and a second separation layer, wherein the first separation layer is situated between the upper substrate and the interior layer, the second separation layer is situated between the lower substrate and the interior layer, and wherein the first and the second separation layers are differentially etchable with respect to the first and the second substrates, the interior layer. The upper substrate is a first device layer from which a probe tip is formed. The interior layer is a second device layer from which a cantilever arm is formed. The lower substrate is a handle layer from which a handle, or base portion, is formed. Patterning and etching processing of any layer is isolated from the other layers by the separation layers.

    Measurement of surface energy components and wettability of reservoir rock utilizing atomic force microscopy
    6.
    发明授权
    Measurement of surface energy components and wettability of reservoir rock utilizing atomic force microscopy 有权
    利用原子力显微镜测量储层岩石的表面能量成分和润湿性

    公开(公告)号:US09110094B2

    公开(公告)日:2015-08-18

    申请号:US14158359

    申请日:2014-01-17

    摘要: An instrument (and corresponding method) performs AFM techniques to characterize properties of a sample of reservoir rock. The AFM instrument is configured to have a probe with a tip realized from reservoir rock that corresponds to the reservoir rock of the sample. The AFM instrument is operated to derive and store data representing adhesion forces between the tip and the sample at one or more scan locations in the presence of a number of different fluids disposed between the tip and the sample. The AFM instrument is further configured to perform computational operations that process the data representing the adhesion forces for a given scan location in order to characterize at least one property of the rock sample at the given scan location. The properties can include total surface energy of the rock sample as well as wettability of the rock sample.

    摘要翻译: 仪器(和相应的方法)执行AFM技术来表征储层岩石样品的性质。 AFM仪器被配置为具有从储层岩石实现的具有对应于样品的储层岩石的尖端的探针。 操作AFM仪器以在存在位于尖端和样品之间的许多不同流体的情况下在一个或多个扫描位置导出和存储表示尖端和样品之间的粘附力的数据。 AFM仪器还被配置为执行计算操作,其处理表示给定扫描位置的粘附力的数据,以便表征给定扫描位置处的岩石样品的至少一个性质。 这些性质可以包括岩石样品的总表面能以及岩石样品的润湿性。

    AFM-coupled microscale radiofrequency probe for magnetic resonance imaging and spectroscopy
    8.
    发明授权
    AFM-coupled microscale radiofrequency probe for magnetic resonance imaging and spectroscopy 有权
    用于磁共振成像和光谱的AFM耦合微型射频探头

    公开(公告)号:US08884608B2

    公开(公告)日:2014-11-11

    申请号:US14351055

    申请日:2012-10-10

    摘要: The present disclosure is discloses the development of a new device, system, and method that combines advantages of magnetic resonance and atomic force microscopy technologies, and the utility of the new device, system, and method for a wide range of biomedical and clinical researchers. According to one aspect of the present disclosure, a device for micro-scale spectroscopy is disclosed. The micro-scale spectroscopy device includes a beam having a distal end, a proximal end, a top surface and a bottom surface, where the beam is attached to an anchor at the proximal end and further includes a tip extending substantially perpendicular from the bottom surface at or near the distal end, and a coil having at least one turn mounted to the top surface of the beam at or near the distal end opposite the tip, where the coil is capable of both transmitting and sensing electromagnetic radiation.

    摘要翻译: 本公开公开了一种结合磁共振和原子力显微技术的优点的新器件,系统和方法的开发,以及用于广泛的生物医学和临床研究者的新器件,系统和方法的实用性。 根据本公开的一个方面,公开了一种用于微尺度光谱的装置。 微型光谱装置包括具有远端,近端,顶表面和底表面的光束,其中光束附接到近端处的锚固件,并且还包括从底表面基本垂直延伸的尖端 在远端处或附近,以及具有至少一个匝的线圈,其安装到梁的顶表面处,或者与尖端相对的远端附近,其中线圈能够传输和感测电磁辐射。

    Video rate-enabling probes for atomic force microscopy
    9.
    发明授权
    Video rate-enabling probes for atomic force microscopy 失效
    用于原子力显微镜的视频速率探测器

    公开(公告)号:US08695111B2

    公开(公告)日:2014-04-08

    申请号:US13275451

    申请日:2011-10-18

    申请人: Chung Hoon Lee

    发明人: Chung Hoon Lee

    IPC分类号: G01Q70/10 G01Q70/16 G01Q70/14

    摘要: Method for producing a probe for atomic force microscopy with a silicon nitride cantilever and an integrated single crystal silicon tetrahedral tip with high resonant frequencies and low spring constants intended for high speed AFM imaging.

    摘要翻译: 用于制备具有氮化硅悬臂的原子力显微镜探针的方法和用于高速AFM成像的具有高谐振频率和低弹簧常数的集成单晶硅四面体尖端的方法。

    Method of determining a spring constant of a cantilever and scanning probe microscope using the method
    10.
    发明授权
    Method of determining a spring constant of a cantilever and scanning probe microscope using the method 有权
    使用该方法确定悬臂弹簧常数和扫描探针显微镜的方法

    公开(公告)号:US08584261B2

    公开(公告)日:2013-11-12

    申请号:US13545197

    申请日:2012-07-10

    CPC分类号: G01Q60/22 G01Q60/38 G01Q70/10

    摘要: In a cantilever which is used in a scanning probe microscope or the like and has a trapezoidal cross-sectional shape formed through anisotropic etching in a silicon process, a cantilever spring constant is determined without measuring a thickness directly. A cantilever thickness is determined based on upper base and lower base lengths of the trapezoidal cross-sectional shape and geometric regularity of a surface generated by the anisotropic etching. Then, the cantilever spring constant is determined based on the cantilever thickness, a cantilever length, and a Young's modulus.

    摘要翻译: 在扫描探针显微镜等中使用的具有通过硅工艺中的各向异性蚀刻形成的梯形截面形状的悬臂中,在不直接测量厚度的情况下确定悬臂弹簧常数。 基于梯形截面形状的上基底和下基底长度以及通过各向异性蚀刻产生的表面的几何规则度来确定悬臂厚度。 然后,基于悬臂厚度,悬臂长度和杨氏模量确定悬臂弹簧常数。