发明授权
- 专利标题: Positive photoresist composition
- 专利标题(中): 正光致抗蚀剂组合物
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申请号: US784469申请日: 1997-01-17
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公开(公告)号: US5683851A公开(公告)日: 1997-11-04
- 发明人: Shiro Tan , Shinji Sakaguchi
- 申请人: Shiro Tan , Shinji Sakaguchi
- 申请人地址: JPX Kanagawa
- 专利权人: Fuji Photo Film Co., Ltd.
- 当前专利权人: Fuji Photo Film Co., Ltd.
- 当前专利权人地址: JPX Kanagawa
- 优先权: JPX8-008388 19960122
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; G03F7/022 ; G03F7/023 ; H01L21/027
摘要:
Provided is a positive photoresist composition comprising (A) an alkali-soluble resin prepared by condensation of aldehydes and a mixture of phenols, which comprises (i) thymol, isothymol or a thymol-isothymol mixture and (ii) one or more of a phenol compound represented by the following formula (I); ##STR1## wherein R.sub.1, R.sub.2 and R.sub.3 are the same or different, and each of them represents a hydrogen atom or a methyl group, and optionally, as a third monomer, (iii) a phenol compound other than m-cresol; (B) 1,2-naphthoquinonediazide-5-(and/or -4-)sulfonic acid esters as photosensitive agent; and (C) a low molecular weight compound having from 12 to 50 carbon atoms in all and from 2 to 8 phenolic hydroxy groups.
公开/授权文献
- US4691107A Infra red photo detector systems 公开/授权日:1987-09-01
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