发明授权
US5695567A Susceptor for a device for epitaxially growing objects and such a device
失效
用于外延生长物体和这种装置的装置的受体
- 专利标题: Susceptor for a device for epitaxially growing objects and such a device
- 专利标题(中): 用于外延生长物体和这种装置的装置的受体
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申请号: US616575申请日: 1996-03-15
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公开(公告)号: US5695567A公开(公告)日: 1997-12-09
- 发明人: Olle Kordina , Jan-Olov Fornell , Rune Berge , Roger Nilsson
- 申请人: Olle Kordina , Jan-Olov Fornell , Rune Berge , Roger Nilsson
- 申请人地址: CHX Zurich
- 专利权人: ABB Research Ltd.
- 当前专利权人: ABB Research Ltd.
- 当前专利权人地址: CHX Zurich
- 主分类号: C30B25/12
- IPC分类号: C30B25/12 ; C30B31/14 ; C23C16/00
摘要:
A susceptor for a device for epitaxially growing objects made of one of SiC, a Group 3B-nitride and alloys thereof on a substrate to be received in the susceptor, includes plurality of separate susceptor wall pieces defining a top wall, a bottom wall and lateral walls. The wall pieces are made of a material which may be heated by induction and are secured to each other to form the susceptor. A channel is defined by susceptor walls adapted to receive the substrate and through which a source material for the growth is to be fed. At least one SiC-plate is inserted to cover at least one of the top and bottom walls and to extend between and separate the lateral walls and the at least one of the top and bottom walls.
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